Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O-3 microcantilever using a direct patternable sol-gel method

Abstract

The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on SiNx/Ta/Pt/PZT/Pt/SiO2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hz/ng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.