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Frequency Characteristics of Micro-cantilever Sensor using Tuning Fork

Other Titles

튜닝포크형 미소 캔틸레버 센서의 주파수 특성

Authors

김충현; 안효석

Issue Date

2005-10

Publisher

한국공작기계학회

Citation

한국공작기계학회지 (Journal of the Korean Society of Machine Tool Engineers), v.14, no.5, pp.35 - 40

Keywords

Sensor; Tuning Fork; Micro-cantilever; MEMS

ISSN

1226-8097

URI

https://pubs.kist.re.kr/handle/201004/136064

Appears in Collections:

KIST Article > 2005

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