DSpace at KIST: Frequency Characteristics of Micro-cantilever Sensor using Tuning Fork

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DC Field	Value	Language
dc.contributor.author	김충현	-
dc.contributor.author	안효석	-
dc.date.accessioned	2024-01-21T04:10:47Z	-
dc.date.available	2024-01-21T04:10:47Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2005-10	-
dc.identifier.issn	1226-8097	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/136064	-
dc.publisher	한국공작기계학회	-
dc.title	Frequency Characteristics of Micro-cantilever Sensor using Tuning Fork	-
dc.title.alternative	튜닝포크형 미소 캔틸레버 센서의 주파수 특성	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	한국공작기계학회지 (Journal of the Korean Society of Machine Tool Engineers), v.14, no.5, pp.35 - 40	-
dc.citation.title	한국공작기계학회지 (Journal of the Korean Society of Machine Tool Engineers)	-
dc.citation.volume	14	-
dc.citation.number	5	-
dc.citation.startPage	35	-
dc.citation.endPage	40	-
dc.subject.keywordAuthor	Sensor	-
dc.subject.keywordAuthor	Tuning Fork	-
dc.subject.keywordAuthor	Micro-cantilever	-
dc.subject.keywordAuthor	MEMS	-

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