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수소 첨가에 따른 육방정 질화붕소 박막의 표면 구조와 잔류응력 감소에 관한 연구

Other Titles

Effect of Hydrogen Addition on Surface Structure andResidual Stress of Hexagonal Boron Nitride Thin Films

Authors

이은옥; 박종극; 정증현; 임대순; 백영준

Issue Date

2005-10

Publisher

대한금속·재료학회

Citation

대한금속·재료학회지, v.43, no.10, pp.667 - 671

Keywords

hBN; 수소; Ar 침투량; 잔류응력; 표면구조; Hydrogen; Residual Stress; Surface morphology

ISSN

1738-8228

URI

https://pubs.kist.re.kr/handle/201004/136072

Appears in Collections:

KIST Article > 2005

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