Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ha, JY | - |
dc.contributor.author | Choi, JW | - |
dc.contributor.author | Kang, CY | - |
dc.contributor.author | Karmanenko, SF | - |
dc.contributor.author | Yoon, SJ | - |
dc.contributor.author | Choi, DJ | - |
dc.contributor.author | Kim, HJ | - |
dc.date.accessioned | 2024-01-21T04:32:15Z | - |
dc.date.available | 2024-01-21T04:32:15Z | - |
dc.date.created | 2021-09-04 | - |
dc.date.issued | 2005-09 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/136172 | - |
dc.description.abstract | Single phase thin films of (Ba0.5Sr0.5)TiO3 have been prepared by single target RF magnetron sputtering. Through post-annealing process in box furnace at 1100 degrees C for 1 h, we have been able to improve the dielectric properties; dielectric permittivity, dielectric loss, and tunability. The change in dielectric properties before and after post-annealing is attributed to the change in film strain and the contraction in film lattice. | - |
dc.language | English | - |
dc.publisher | JAPAN SOC APPLIED PHYSICS | - |
dc.subject | ELECTRICAL-PROPERTIES | - |
dc.title | Effects of annealing process on dielectric properties of (Ba,Sr)TiO3 thin films grown by RF magnetron sputtering | - |
dc.type | Article | - |
dc.identifier.doi | 10.1143/JJAP.44.L1196 | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, v.44, no.37-41, pp.L1196 - L1198 | - |
dc.citation.title | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | - |
dc.citation.volume | 44 | - |
dc.citation.number | 37-41 | - |
dc.citation.startPage | L1196 | - |
dc.citation.endPage | L1198 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.wosid | 000232641900012 | - |
dc.identifier.scopusid | 2-s2.0-32044474457 | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalResearchArea | Physics | - |
dc.type.docType | Article | - |
dc.subject.keywordPlus | ELECTRICAL-PROPERTIES | - |
dc.subject.keywordAuthor | BST RF sputtering | - |
dc.subject.keywordAuthor | ferroelectric | - |
dc.subject.keywordAuthor | microwave | - |
dc.subject.keywordAuthor | tunable devices | - |
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