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A Fabrication of IR CO2 Sensor based on the MEMS and Characteristic Evaluation

Other Titles

MEMS 기반 IR CO2 센서 제작 및 특성 평가

Authors

김신근; 한용희; 문성욱

Issue Date

2005-05

Citation

대한전기학회 논문지 (KIEE International Transactions on Electrophysics and Application), v.54C, no.5, pp.232 - 237

Keywords

MEMS; CO2 sensor; microbolometer; NDIR

URI

https://pubs.kist.re.kr/handle/201004/136484

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KIST Article > 2005

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