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DI-WeM8 characteristics of tungsten nitride atomic layer deposition

Title
DI-WeM8 characteristics of tungsten nitride atomic layer deposition
Authors
심현상; 김용태; H. Jeon
Keywords
atomic layer deposition; tungsten nitride
Issue Date
2001-10
Publisher
2001 AVS 48th International Symposium
Citation
, 153-153
URI
https://pubs.kist.re.kr/handle/201004/13715
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KIST Publication > Conference Paper
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