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Structural and Electrical properties of WOx Thin Films Deposited by Direct Current Reactive Sputtering for NOx Gas Sensor

Authors

윤영수; 김태송; 최원국

Issue Date

2004-02

Citation

Journal of The Korean Ceramic Society, v.41, no.2, pp.97 - 101

Keywords

WOx; Semiconductor type sensor; Nox; Sensitivity; Thin film

URI

https://pubs.kist.re.kr/handle/201004/137857

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KIST Article > 2004

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