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플라즈마 화학 기상 증착법을 이용한 탄소나노튜브의 성장 분석 및 전계방출 특성

Other Titles

Field Emission Characteristics and Growth Analysis of Carbon Nanotubes by Plasma-enhanced Chemical Vapor Deposition

Authors

오정근; 주병권; 김남수

Issue Date

2003-12

Publisher

한국전기전자재료학회

Citation

전기전자재료학회논문지, v.16, no.12S

Keywords

Carbon nanotubes; PECVD; Field Emission; Co catalyst metal; H2

ISSN

1226-7945

URI

https://pubs.kist.re.kr/handle/201004/138019

Appears in Collections:

KIST Article > 2003

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