Tribological properties of sputtered boron carbide coating and the effect of CH4 reactive component of processing gas
- Authors
- Pham Duc Cuong; 안효석; 김종희; 신경호
- Issue Date
- 2003-12
- Citation
- KSTLE International Journal, v.4, no.2, pp.56 - 59
- Keywords
- boron carbide coating; DC magnetron sputtering; processing gas; friction and wear; X-ray photoelectron spectroscopy; auger electron spectroscopy
- ISSN
- 1229-9189
- URI
- https://pubs.kist.re.kr/handle/201004/138033
- Appears in Collections:
- KIST Article > 2003
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