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단일 공정에 의한 고효율 단일모드 반도체 레이저 구조 제작을 위한 고밀도 양자 나노구조 형성

Other Titles

High-density quantum nanostructure for single mode distributed feedback semiconductor lasers by one-step growth

Authors

손창식; 백종협; 김성일; 박용주; 김용태; 최훈상; 최인훈

Issue Date

2003-08

Publisher

한국재료학회

Citation

한국재료학회지, v.13, no.8, pp.485 - 490

Keywords

submicron grating; GaAs; MOCVD; holography; e-beam lithography

ISSN

1225-0562

URI

https://pubs.kist.re.kr/handle/201004/138335

Appears in Collections:

KIST Article > 2003

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