DSpace at KIST: SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구

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DC Field	Value	Language
dc.contributor.author	윤의성	-
dc.contributor.author	박지현	-
dc.contributor.author	양승호	-
dc.contributor.author	한흥구	-
dc.contributor.author	공호성	-
dc.contributor.author	고석근	-
dc.date.accessioned	2024-01-21T09:07:02Z	-
dc.date.available	2024-01-21T09:07:02Z	-
dc.date.created	2022-01-10	-
dc.date.issued	2003-04	-
dc.identifier.issn	1229-4845	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/138690	-
dc.language	Korean	-
dc.title	SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구	-
dc.title.alternative	Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM	-
dc.type	Article	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국윤활학회지, v.v. 19, no.no. 2, pp.109 - 115	-
dc.citation.title	한국윤활학회지	-
dc.citation.volume	v. 19	-
dc.citation.number	no. 2	-
dc.citation.startPage	109	-
dc.citation.endPage	115	-
dc.description.isOpenAccess	N	-
dc.description.journalRegisteredClass	kci	-
dc.subject.keywordAuthor	nano-adhesion	-
dc.subject.keywordAuthor	nano-friction	-
dc.subject.keywordAuthor	hydrophobic film	-
dc.subject.keywordAuthor	tribology	-
dc.subject.keywordAuthor	SPM	-

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