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A noble suspended type thin film resonator (STFR) using the SOI technology

Title
A noble suspended type thin film resonator (STFR) using the SOI technology
Authors
김현호; 주병권; 이윤희; 이시형; 이전국; 김수원
Keywords
suspended; Thin film resonator; SOI technology; Piezoelectric; AlN
Issue Date
2001-04
Publisher
Sensors and actuators. A, Physical
Citation
VOL 89, NO 3, 255-258
URI
https://pubs.kist.re.kr/handle/201004/13873
ISSN
0924-4247
Appears in Collections:
KIST Publication > Article
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