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Growth of heteroepitaxial ZnO thin film by off-axis RF magnetron sputtering

Other Titles

Off-axis 고주파 마그네트론 스퍼터링법을 이용한 이종에피텍셜 ZnO 박막 성장

Authors

박재완; 박종완; 이전국

Issue Date

2003-03

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.v. 40, no.no. 3, pp.262 - 267

Keywords

Heteroepitaxial

URI

https://pubs.kist.re.kr/handle/201004/138754

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KIST Article > 2003

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