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Effects of synthetic temperature and suspension stability of CeO₂abrasive on CMP characteristics

Other Titles

CeO₂연마입자의 합성온도와 수계안정성이 CMP 특성에 미치는 영향

Authors

임건자; 김태은; 이종호; 김주선; 이해원; 현상훈

Issue Date

2003-02

Citation

Journal of the Korean Ceramic Society, v.40, no.2, pp.167 - 171

Keywords

CeO₂; chemical mechanical planarization; synthetic temperature; suspension stability; pH

URI

https://pubs.kist.re.kr/handle/201004/138844

Appears in Collections:

KIST Article > 2003

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