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A study on the ZnO piezoelectric thin films for SAW filter by RF magnetron sputtering

Other Titles

RF 마그네트론 스퍼터링에 의한 SAW 필터용 ZnO 압전 박막에 관한 연구

Authors

최형욱; 김경환; 김상종; 강종윤; 안병국; 윤석진

Issue Date

2002-09

Citation

전기전자재료학회논문지, v.15, no.9, pp.798 - 807

Keywords

ZnO; preferred orientation; surface roughness; resistivity; RF magnetron sputter

URI

https://pubs.kist.re.kr/handle/201004/139224

Appears in Collections:

KIST Article > 2002

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