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dc.contributor.author문성욱-
dc.date.accessioned2024-01-21T10:10:50Z-
dc.date.available2024-01-21T10:10:50Z-
dc.date.created2022-01-10-
dc.date.issued2002-08-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/139304-
dc.titleOptical MEMS-MEMS 기술의 센서 응용 ( 비냉각형 적외선 이미지 소자를 중심으로 )-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationSemiconductor Monthly, v.174, pp.40 - 57-
dc.citation.titleSemiconductor Monthly-
dc.citation.volume174-
dc.citation.startPage40-
dc.citation.endPage57-
dc.subject.keywordAuthorMEMS-
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KIST Article > 2002
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