Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 문성욱 | - |
| dc.date.accessioned | 2024-01-21T10:15:59Z | - |
| dc.date.available | 2024-01-21T10:15:59Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 2002-07 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/139397 | - |
| dc.title | Optical MEMS. | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | Semiconductor Monthly, v.no. 173, pp.51 - 57. | - |
| dc.citation.title | Semiconductor Monthly | - |
| dc.citation.volume | no. 173 | - |
| dc.citation.startPage | 51 | - |
| dc.citation.endPage | 57. | - |
| dc.subject.keywordAuthor | MEMS | - |
- Appears in Collections:
- KIST Article > 2002
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