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전해전착시 상감 구리 배선의 충전에 미치는 전류파형의 효과

Other Titles

Effects of Current Wave Forms on the Copper Trench Filling during Damascene Plating

Authors

李유鏞; 李在峰; 趙炳源; 朴榮俊

Issue Date

2002-05

Publisher

대한금속·재료학회

Citation

대한금속·재료학회지, v.40, no.5, pp.550 - 555

Keywords

electroplating

ISSN

1738-8228

URI

https://pubs.kist.re.kr/handle/201004/139569

Appears in Collections:

KIST Article > 2002

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