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Nanotribological characteristics of silicon surfaces modified by IBAD

Other Titles

IBAD 로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성

Authors

윤의성; 박지현; 양승호; 공호성; 장경영

Issue Date

2002-02

Citation

한국윤활학회지 = Journal of the KSTLE, v.18, no.1, pp.1 - 8

Keywords

nano-adhesion

URI

https://pubs.kist.re.kr/handle/201004/139784

Appears in Collections:

KIST Article > 2002

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