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A study on the ZnO thin film SAW filter by RF sputter

Other Titles

RF 마그네트론 스퍼터링에 의한 ZnO 박막 SAW 필터에 관한 연구

Authors

박용욱; 신현용; 박정흠; 강종윤; 심성훈; 최지원; 윤석진; 김현재; 김경환; 최형욱

Issue Date

2001-06

Publisher

한국전기전자재료학회

Citation

TEEM (한국전기전자재료학회), v.14, no.6, pp.481 - 486

Keywords

ZnO thin film; preferred orientation; resistivity; RF magnetron sputter; SAW; Propagation velocity; Insertion loss

ISSN

1229-7607

URI

https://pubs.kist.re.kr/handle/201004/140421

Appears in Collections:

KIST Article > 2001

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