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Fabrication and characterization of suspended-type thin film resonator using SOI-micromachining process

Other Titles

SOI 마이크로 머시닝 공정을 이용한 suspended-type 박막공진기의 제작 및 특성평가

Authors

주병권; 김현호; 이시형; 이전국; 김수원

Issue Date

2001-06

Publisher

大韓電氣學會

Citation

전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.50, no.6, pp.303 - 306

Keywords

thin film resonator; soi

ISSN

0254-4172

URI

https://pubs.kist.re.kr/handle/201004/140443

Appears in Collections:

KIST Article > 2001

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