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Micromachining and fabrication of thin films for MEMS-infrared detectors

Authors

염상섭; 박흥우; 박윤권; 주병권; 오영제; 이종훈; 정문교; 서상희; 황근창

Issue Date

2001-04

Publisher

한국요업학회

Citation

Korean Journal of Ceramics, v.7, no.1, pp.36 - 40

Keywords

uncooled IR sensor; MEMS; Multilayered thin film

ISSN

1225-9381

URI

https://pubs.kist.re.kr/handle/201004/140553

Appears in Collections:

KIST Article > 2001

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