MEMS 기술을 이용한 감지 및 제어기의 기술동향

Authors
박세광김태송
Issue Date
2000-12
Citation
전기전자학회지, v.49, no.12, pp.10 - 15
Keywords
MEMS
URI
https://pubs.kist.re.kr/handle/201004/140881
Appears in Collections:
KIST Article > 2000
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