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A prediction method of temperature distribution on the wafer in a rapid thermal process system with multipoint sensing

Other Titles

고속 열처리 시스템에서 웨이퍼 상의 다중점 계측에 의한 온도 분포 추정 기법 연구

Authors

심영렬; 이석주; 민병조; 조영조; 김학배

Issue Date

2000-02

Publisher

대한전기학회

Citation

전기학회논문지 D = Transactions of the Korean Institute of Electrical Engneers, v.49, no.2, pp.62 - 67

Keywords

rapid thermal process; thermal modeling; tempertaure estimation; chamber geometry; run-by-run control

ISSN

1229-6287

URI

https://pubs.kist.re.kr/handle/201004/141592

Appears in Collections:

KIST Article > 2000

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