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dc.contributor.author윤영수-
dc.contributor.author임재홍-
dc.contributor.author윤석진-
dc.date.accessioned2024-01-21T14:35:12Z-
dc.date.available2024-01-21T14:35:12Z-
dc.date.created2022-01-10-
dc.date.issued2000-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/141661-
dc.titleFabrication of piezoresistive pressure sensor based on poly-Si-
dc.title.alternative벌크 마이크로 머시닝에 의한 다결정 실리콘 압력센서-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation전자부품, v.1, pp.74 - 77-
dc.citation.title전자부품-
dc.citation.volume1-
dc.citation.startPage74-
dc.citation.endPage77-
dc.subject.keywordAuthorbulk micromachining-
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KIST Article > 2000
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