DSpace at KISTKIST PublicationArticle

Design systhesis, and application of new Ti precursors compatible with Ba and Sr precursors for BST thin film by MOCVD

Title
Design systhesis, and application of new Ti precursors compatible with Ba and Sr precursors for BST thin film by MOCVD
Authors
우경자
Keywords
design; synthesis; Ti precursor; MOCVD; deposition rate
Issue Date
2002-06
Publisher
Journal de Physique Ⅳ
Citation
VOL 12, Pr4-45-Pr4-50
URI
https://pubs.kist.re.kr/handle/201004/14348
ISSN
1155-4339
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Full Item Record


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE