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Elastic modulus and structural evolution of diamond-like carbon films deposited by RF-PACVD.

Title: Elastic modulus and structural evolution of diamond-like carbon films deposited by RF-PACVD.

Authors: 정진원; 고대홍; 은광용; 이광렬

Keywords: elastic modulus

Issue Date: 2002-07

Publisher: Diamond and Related Materials

Citation: v. 11, no. 7, 1441-1446.

URI: https://pubs.kist.re.kr/handle/201004/14386

ISSN: 0925-9635

Appears in Collections:: KIST Publication > Article

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