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광도파로 소자 제작을 위한 레이저 리소그래피 장치

Other Titles

Laser lithography system for the fabrication of optical waveguides

Authors

박경현; 변영태; 김명욱; 김선호; 최상삼; 조욱래; 박승한; 김웅

Issue Date

1997-04

Publisher

한국광학회

Citation

한국광학회지, v.8, no.2, pp.169 - 173

Keywords

광도파로; 광소자; 레이저 리소그래피

ISSN

1225-6285

URI

https://pubs.kist.re.kr/handle/201004/143871

Appears in Collections:

KIST Article > Others

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