Effects of bottom electrode on the structural and electrical properties of PbTiO3 ferroelectric thin films

Authors
Lee, HNKim, YTChoh, SH
Issue Date
1997-01
Publisher
GORDON BREACH SCI PUBL LTD
Citation
FERROELECTRICS, v.197, no.1-4, pp.733 - 739
Abstract
The effect of RuOx and Pt electrodes on the crystal structure, leakage current characteristics and dielectric properties of PbTiO3 are compared with as-deposited and annealed samples. As a result, amorphous or microcrystalline PbTiO3 films on RuOx and Pt are recrystallized along the [100] direction after annealing at 600 degrees C for 30min in O-2 ambient. The leakage current density for both samples are very similar, whereas the dielectric property of RuOx/PbTiO3 is superior to that of Pt/PbTiO3 due to the large grain growth of PbTiO3 on RuOx confirmed with cross-sectional transmission electron microscopy.
ISSN
0015-0193
URI
https://pubs.kist.re.kr/handle/201004/143990
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KIST Article > Others
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