활성화 금속이온빔, 산소가스이온빔, 하이브리드이온빔에 의해 형성된 산화주석 (Tin Oxide) 박막의 특성

Authors
정형진고석근최원국송석균백홍규이정용
Issue Date
1996-01
Publisher
한국물리학회
Citation
응용물리, v.9, no.5, pp.686 - 691
ISSN
1013-7009
URI
https://pubs.kist.re.kr/handle/201004/144682
Appears in Collections:
KIST Article > Others
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