Surfae analysis of PZT film prepared by sputtering method.

Other Titles
Sputtering 법에 의해 성장시킨 PZT 막막의 표면 분석 =
Authors
김영관박주상추정우손병청이전국
Issue Date
1996-01
Citation
한국진공학회지 = Journal of Korean vacuum society, v.v. 5, no.no. 2, pp.107 - ?
URI
https://pubs.kist.re.kr/handle/201004/144758
Appears in Collections:
KIST Article > Others
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