A study on the film-formation mechanism by ionized cluster beam deposition.

Other Titles
이온화 클러스터 빔 증착의 박막형성 기구에 관한 연구 =
Authors
신치범이경호윤경석황경순문상흡조원일
Issue Date
1996-01
Citation
공업화학, v.v. 7, no.no. 3, pp.464 - 472
URI
https://pubs.kist.re.kr/handle/201004/144812
Appears in Collections:
KIST Article > Others
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