DSpace at KISTKIST PublicationArticle

Calibration of MEMS strain sensors fabricated on silicon: theory and experiments.

Title
Calibration of MEMS strain sensors fabricated on silicon: theory and experiments.
Authors
Charles Hautamaki; Li Cao; Jia Zhou; Susan C. Mantell; 김태송
Keywords
calibration
Issue Date
2003-10
Publisher
Journal of Microelectromechanical Systems
Citation
v. 12, no. 5, 720-727.
URI
https://pubs.kist.re.kr/handle/201004/14521
ISSN
1057-7157
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Full Item Record


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE