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Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis

Other Titles

RF magnetron sputtering 법을 이용한 압전성 ZnO 박막의 제조 및 그 표면분석

Authors

임상우; 설용건; 최지원; 이전국; 정형진

Issue Date

1995-01

Publisher

한국화학공학회 / Korean Institute of Chemical Engineers

Citation

화학공학 = Journal of the Korean Institute of Chemical Engineers, v.33, no.2, pp.235 - 242

ISSN

0304-128X

URI

https://pubs.kist.re.kr/handle/201004/145222

Appears in Collections:

KIST Article > Others

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