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수직 웨이퍼상의 입자 침착속도의 측정

Other Titles

Measurement of particle deposition velocity toward a vertical wafer surface

Authors

배귀남; 이춘식; 박승오; 안강호

Issue Date

1995-01

Citation

공기조화·냉동공학논문집, v.7, no.3, pp.521 - 527

Keywords

particle deposition velocity; 입자침착속도; 수직웨이퍼; 대류확산

URI

https://pubs.kist.re.kr/handle/201004/145362

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KIST Article > Others

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