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화학증폭을 이용한 원자외선용 포지티브 레지스트의 표면 불용성 억제

Other Titles

Inhibition of surface insolubilization in chemically amplified positive type deep-UV resists.

Authors

양승관; 박찬언; 강종희; 안광덕

Issue Date

1994-07

Publisher

한국고분자학회

Citation

폴리머, v.v. 18, no.no. 4, pp.622 - 631

Keywords

deep UV resists

ISSN

0379-153X

URI

https://pubs.kist.re.kr/handle/201004/145545

Appears in Collections:

KIST Article > Others

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