SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS PREPARED BY DC PLASMA CHEMICAL-VAPOR-DEPOSITION

Abstract

YBa2Cu3O7-x superconducting thin films were grown on polycrystalline yttria-stabilized zirconia (p-YSZ) and single-crystalline SrTiO3 substrates by DC plasma-assisted metallorganic chemical vapour deposition. A DC plasma was generated in the reaction chamber by applying a DC potential of 200 V at a plasma current of 2 mA. The as-deposited films on an SrTiO3 substrate at a temperature of 730-degrees-C show a sharp resistive transition of T(c,zero) = 88 K. We show that DC plasma-assisted metallorganic chemical vapour deposition is useful to obtain YBa2Cu3O7-x thin films with the c axis normal to the p-ysz and SrTiO3 substrates.