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Terpolymers of tosyloxymaleimide for application as a polymeric photoacid generator in single-component resists.

Authors

안광덕; 구덕일; 정찬문

Issue Date

1994-01

Citation

Journal of photopolymer science and technology, v.v. 7, no.no. 3, pp.473 - 482

Keywords

functional polymaleimides; tosyloxymaleimide; polymeric photoacid generator; single-component resists; chemical amplification resists; photoresists

URI

https://pubs.kist.re.kr/handle/201004/145766

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KIST Article > Others

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