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Annealing effects on the properties of TiW/WNx bilayer.

Authors

김용태; D. J. Kim; C. S. Kwon; J. W. Park; 민석기

Issue Date

1994-01

Citation

한국물리학회 제 69 회 학술논문 발표회, pp.? - ?

URI

https://pubs.kist.re.kr/handle/201004/145773

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KIST Article > Others

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