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GaAs single crystal growth by the VGF technique.

Other Titles

VGF 법에 의한 GaAs 단결정성장 =

Authors

박용주; 박승철; 한철원; 민석기; 심광보

Issue Date

1991-05

Citation

Korean applied physics, v.v. 4, no.no. 2, pp.194 - 199

Keywords

VGF 결정성장장치; DMF 전기로; GaAs; 원형 wafer

URI

https://pubs.kist.re.kr/handle/201004/146800

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KIST Article > Others

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