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생체계측을 위한 피하주입형 Si 센서의 기술동향

Authors

주병권; 이명복; 이정일; 김형곤; 강광남; 오명환

Issue Date

1990-06

Publisher

대한전자공학회

Citation

전자공학회지, v.17, no.3, pp.1 - 9

Keywords

MEMS; micromachining; microsensor

ISSN

1016-9288

URI

https://pubs.kist.re.kr/handle/201004/147092

Appears in Collections:

KIST Article > Others

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