Growth and characterization of low-dislotation GaAs single crystal by the DM furnace
- Other Titles
- DM 전기로를 사용한 저결함 GaAs 단결성 성장과 특성평가
- Authors
- 박용주; 민석기; 김은규; 김용; 한철원; 심광보; 박승철
- Issue Date
- 1989-04
- Publisher
- 한국물리학회
- Citation
- 새물리, v.29, no.2, pp.160 - 166
- Keywords
- DM 전기로; GaAs; impurity hardening; 전위; GaAs bulk growth; direct monitoring furnace; dislotation density
- ISSN
- 0374-4914
- URI
- https://pubs.kist.re.kr/handle/201004/147359
- Appears in Collections:
- KIST Article > Others
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