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Properties of co-deposited indium tin oxide and zinc oxide films using a bipolar pulse power supply and a dual magnetron sputter source

Title: Properties of co-deposited indium tin oxide and zinc oxide films using a bipolar pulse power supply and a dual magnetron sputter source

Authors: 황만수; 정희섭; 김원목; 서용운

Keywords: ITO; ZnO; co-sputtering; bipolar pulse power supply

Issue Date: 2003-07

Publisher: Journal of Vacuum Science & Technology A

Citation: v. 21, no. 4, 1399-1403

URI: https://pubs.kist.re.kr/handle/201004/14754

ISSN: 0734-2101

Appears in Collections:: KIST Publication > Article

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