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Effect of plasma immersing on crystallinity of vanadium oxide cathode film grown at room temperature during D.C. reactive sputtering

Title
Effect of plasma immersing on crystallinity of vanadium oxide cathode film grown at room temperature during D.C. reactive sputtering
Authors
최선희; Young-Ah Jeon; 윤영수
Keywords
thin film battery; thin film supercapacitor; SnO₂-RuO₂ composite; hybrid; monolithic
Issue Date
2003-09
Publisher
The 4th Asian-European International Conference on Plasma Surface Engineering
Citation
, 178-178
URI
https://pubs.kist.re.kr/handle/201004/14811
Appears in Collections:
KIST Publication > Conference Paper
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