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3D MEMS antenna for IR sensor using novel UV-lithography, plastic micro machining and mesh structure bonding technique

Title
3D MEMS antenna for IR sensor using novel UV-lithography, plastic micro machining and mesh structure bonding technique
Authors
박종연; 김근태; 문성욱; 박정호
Keywords
MEMS; plastic micro machining; mesh structure bonding
Issue Date
2003-08
Publisher
2003 IEEE/LEOS International Conference on Optical MEMs
URI
https://pubs.kist.re.kr/handle/201004/14870
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KIST Publication > Conference Paper
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