FED 기술 강좌 : 진공 마이크로 일렉트로직스 (I)

Authors
Ju Byeong KwonOH MYUNG HWAN
Issue Date
1996-05
Keywords
MEMS
URI
https://pubs.kist.re.kr/handle/201004/148810
Appears in Collections:
KIST Publication > Others
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