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Study of temperature dependent conductivity of Ta, Ta-Si-N thin films.

Other Titles

Study of temperature dependent conductivity of Ta, Ta-Si-N thin films.

Authors

Kim Yong Tae; S. P. Jeong; D. J. Kim; H. N. Lee; Min Suk-Ki

Issue Date

1996-01

URI

https://pubs.kist.re.kr/handle/201004/148820

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KIST Publication > Others

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