Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ahn, Jae Pyoung | - |
dc.contributor.author | Kim Kyou Hyun | - |
dc.contributor.author | Yoon Sang Won | - |
dc.date.accessioned | 2024-02-21T05:14:09Z | - |
dc.date.available | 2024-02-21T05:14:09Z | - |
dc.date.issued | 2008-10 | - |
dc.identifier.issn | - | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/149007 | - |
dc.subject | FIB | - |
dc.subject | TEM | - |
dc.subject | TEM sampling | - |
dc.subject | Nano patterning | - |
dc.subject | Contamination | - |
dc.title | Recent FIB applications for TEM works of thin films | - |
dc.type | Book | - |
dc.citation.startPage | 281 | - |
dc.citation.endPage | 297 | - |
dc.relation.isPartOfSeries | Transworld Research Network | - |
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