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저저항 배선재료 금속 필름 제조 방법 및 제조 장치

Author

한승희; 서민; 신상범; 강운현; 전신영; 조민경

Assignee

한국과학기술연구원

Regitration Date

2024-04-17

Registration No.

10-2659491

Application Date

2021-08-12

Application No.

10-2021-0106878

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/149757

Appears in Collections:

KIST Patent > 2021

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